Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/21/1992
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Application #:
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07632942
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Filing Dt:
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12/20/1990
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Inventor:
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AKIHIRO HOSOKAWA
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Title:
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APPARATUS FOR MEASURING TEMPERATURE OF WAFER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| 3050 BOWERS AVE. |
| A CORP. OF CA. |
| SANTA CLARA, CALIFORNIA |
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| KEIICHI NISHIMURA |
| HELLER, EHRMAN, WHITE & MCAULIFFE |
| 333 BUSH STREET |
| SAN FRANCISCO, CA. 94104-2878 |
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