Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/14/1992
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Application #:
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07690137
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Filing Dt:
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04/23/1991
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Inventors:
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PETER F. EBBING, KIEN N. CHUC, JACK FORD, FRED H. HARIZ, MICHAEL N. SUGARMAN
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Title:
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METHOD AND APPARATUS TO INHIBIT OBSTRUCTION OF OPTICAL TRANSMISSION THROUGH SEMICONDUCTOR ETCH PROCESS CHAMBER VIEWPORT
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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A CORPORATION OF DE |
3050 BOWERS AVENUE |
SANTA CLARA, CALIFORNIA 95054 |
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ROBERT J. STERN |
MAIL STOP 0934, LEGAL AFFAIRS DEPT. |
APPLIED MATERIALS, INC. |
3050 BOWERS AVE. |
SANTA CLARA, CA 95054 |
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