Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/27/1992
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Application #:
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07518971
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Filing Dt:
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05/04/1990
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Inventors:
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MASATO TANAKA, HISAO NISHIZAWA, NOBUYUKI HIRAI, KAORU SHINBARA, HITOSHI YOSHIOKA
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Title:
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WAFER CLEANING METHOD AND APPARATUS THEREFOR
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| 1-1 TENJINKITAMACHI, TERANOUCHI-AGARU |
| 4-CHOME, HORIKAWA-DORI |
| KAMIKYO-KU, KYOTO, JAPAN |
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| OSTROLENK, FABER, GERB & SOFFEN |
| 1180 AVENUE OF THE AMERICAS |
| NEW YORK, NY 10036-8403 |
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