Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/10/1992
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Application #:
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07372716
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Filing Dt:
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06/27/1989
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Inventors:
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TADASI SONOBE, KAZUO SUZUKI, TAKUYA FUKUDA, MICHIO OHUE
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Title:
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MICROWAVE-EXCITED PLASMA PROCESSING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| 6, KANDA SURUGADAI 4-CHOME, |
| CHIYODA-KU, |
| TOKYO, JAPAN |
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| 9-1, OHSECHO-2-CHOME, HITACHI-SHI, |
| IBARAKI-KEN, JAPAN |
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| ANTONELLI, TERRY & WANDS |
| SUITE 600 |
| 1919 PENNSYLVANIA AVE., N. W. |
| WASHINGTON, DC 20006 |
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