Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/01/1992
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Application #:
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07708395
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Filing Dt:
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05/31/1991
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Inventors:
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HAJIME HAYAKAWA, KAZUMITSU NAKAMURA, HIROYUKI ITOH
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Title:
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CHARGED PARTICLE BEAM PROJECTION ALIGNER HAVING POSITION DETECTOR USING LIGHT BEAM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| 6, KANDA SURUGADAI 4-CHOME, CHIYODA-KU |
| TOKYO 101, JAPAN |
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| MELVIN KRAUS |
| ANTONELLI, TERRY, STOUT AND KRAUS |
| STE. 600 |
| 1919 PENNSYLVANIA AVENUE, N.W. |
| WASHINGTON, DC 20006 |
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