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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
02/16/1993
Application #:
07804451
Filing Dt:
12/10/1991
Inventors:
SHIGEYOSHI NETSU, MASAKI KAMEYA, YASUYUKI HARADA, HIROSHI AMANO
Title:
APPARATUS FOR CLEANING SILICON WAFER
Assignment: 1
Reel/Frame:
005943/0438Recorded: 12/10/1991Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST.
Assignors:
Exec Dt:
11/21/1991
Exec Dt:
11/27/1991
Exec Dt:
12/04/1991
Exec Dt:
12/04/1991
Assignees:
4-2, MARUNOUCHI 1 CHOME, CHIYODA-KU
TOKYO, JAPAN
2-15-13, MIYAMACHI, FUCHU-SHI
TOKYO, JAPAN
Correspondent:
NIXON & VANDERHYE
14TH FLOOR
2200 CLARENDON BLVD.
ARLINGTON, VA 22201

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