Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/23/1993
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Application #:
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07702654
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Filing Dt:
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05/17/1991
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Inventors:
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MICHAEL S. BARNES, JOHN C. FORSTER, JOHN H. KELLER
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Title:
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PLASMA WAFER PROCESSING TOOL HAVING CLOSED ELECTRON CYCLOTRON RESONANCE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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INTELLECTUAL PROP. LAW |
IBM CORPORATION, DEPT. 18G |
BUILDING 300-482, ROUTE 52 |
HOPEWELL JUNCTION, NY 12533 |
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