Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/20/1993
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Application #:
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07814973
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Filing Dt:
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12/24/1991
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Inventors:
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SON VAN NGUYEN, DAVID M. DOBUZINSKY, DOUGLAS J. DOPP, DAVID L. HARMON
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Title:
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PLASMA ENHANCED CVD PROCESS FOR FLUORINATED SILICON NITRIDE FILMS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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PHILIP E. HANSEN |
HESLIN & ROTHENBERG |
WALL STREET CENTER |
450 NEW KARNER ROAD, P.O. BOX 12695 |
ALBANY, NY 12212-2695 |
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