Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/11/1993
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Application #:
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07852048
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Filing Dt:
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03/16/1992
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Inventors:
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MIKIO SHODA, MASAAKI YAMAMOTO
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Title:
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SPIN COATING APPARATUS WITH AN UPPER SPIN PLATE CLEANING NOZZLE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| 1-1 TENJINKITAMACHI, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIKYO-KU |
| KYOTO, JAPAN |
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| LOWE, PRICE, LEBLANC & BECKER |
| ATTN: STEPHEN A. BECKER |
| 99 CANAL CENTER PLAZA, SUITE 300 |
| ALEXANDRIA, VA 22314 |
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