Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/11/1993
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Application #:
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07850691
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Filing Dt:
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03/11/1992
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Inventors:
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MEGURU KASHIDA, YOSHIHIRO KUBOTA, YOSHIHIKO NAGATA
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Title:
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MEMBRANE CONSISTING OF SILICON CARBIDE AND SILICON NITRIDE, METHOD FOR THE PREPARATION THEREOF AND MASK FOR X-RAY LITHOGRAPHY UTILIZING THE SAME
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| 6-1, OHTEMACHI 2-CHOME, CHIYODA-KU |
| TOKYO, JAPAN |
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| JULES E. GOLDBERG |
| MC AULAY FISHER NISSEN GOLDBERG & KIEL |
| 261 MADISON AVENUE |
| NEW YORK, NY 10016 |
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