Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/25/1993
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Application #:
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07788318
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Filing Dt:
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11/05/1991
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Inventor:
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HIROYUKI SAKAI
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Title:
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ELECTRON BEAM LITHOGRAPHY AND WORKPIECE SUPPORTING APPARATUS HAVING SUPPORTING MEANS FOR WORK PIECE STAGE AND MOVING MEANS DETACHABLY MOUNTED TO COVER OPENING IN VACUUM CHAMBER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| A CORP. OF JAPAN |
| 6, KANDA SURUGADAI 4-CHOME, CHIYODA-KU |
| TOKYO, JAPAN |
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| ANTONELLI, TERRY, STOUT AND KRAUS |
| SUITE 600 |
| 1919 PENNSYLVANIA AVE., N. W. |
| WASHINGTON, DC 20006 |
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