Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/03/1993
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Application #:
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07679317
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Filing Dt:
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04/02/1991
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Inventors:
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MINORI NOGUCHI, YUKIO KEMBO, HIROSHI MORIOKA, HIROSHI YAMAGUCHI, MAKIKO KOHNO et al
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Title:
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METHOD AND APPARATUS OF INSPECTING FOREIGN MATTERS DURING MASS PRODUC- TION START-UP AND MASS PRODUCTION LINE IN SEMICONDUCTOR PRODUCTION PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| 6, KANDA SURUGADAI 4-CHOME, CHIYODA-KU, |
| TOKYO, JAPAN |
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| ANTONELLI, TERRY, STOUT & KRAUS |
| 1919 PENNSYLVANIA AVE., NW, SUITE 600 |
| WASHINGTON, DC 20006 |
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