Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/14/1993
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Application #:
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07418724
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Filing Dt:
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10/03/1989
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Inventor:
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HITOSHI EBATA
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Title:
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PROCESS CONTROL SYSTEM OF SEMICONDUCTOR VAPOR PHASE GROWTH APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2068-3, OOKA, NUMAZU-SHI |
| SHIZUOKA-KEN, JAPAN |
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| PILLSBURY WINTHROP SHAW PITTMAN LLP |
| 1650 TYSONS BOULEVARD |
| MCLEAN, VA 22102 |
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