Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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Issue Dt:
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09/28/1993
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Application #:
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07864185
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Filing Dt:
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04/03/1992
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Inventors:
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EIICHI SHIRAKAWA, MASAFUMI NOMURA, KIMIHARU MATSUMURA
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Title:
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INDIRECT TEMPERATURE MEASUREMENT OF FILMS FORMED ON SEMICONDUCTOR WAFERS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| 2655 TSUKURE, KIKUYO-MACHI, KIKUCHI-GUN |
| KUMAMOTO 869-11, JAPAN |
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| 2-3-9, AMANUMA, SUGINAMI-KU |
| TOKYO 167, JAPAN |
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| OBLON, SPIVAK, MCCLELLAND, MAIER & |
| NEUSTADT, P.C. |
| STUART D. DWORK |
| 1755 JEFFERSON DAVIS HWY., 4TH FLOOR |
| ARLINGTON, VA 22202 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2655 TSUKURE, KIKUYO-MACHI |
| KIKUCHI-GUN, KUMAMOTO 869-11, JAPAN |
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| OBLON, SPIVAK, MCCLELLAND, MAIER ET AL. |
| MARVIN J. SPIVAK |
| 1755 JEFFERSON DAVID HIGHWAY 4TH FLOOR |
| ARLINGTON, VIRGINIA 22202 |
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Assignment:
3
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6 AKASAKA 5-CHOME |
| MINATO-KU, TOKYO 107, JAPAN |
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| OBLON, SPIVAK, MCCLELLAND, ET AL. |
| MARVIN J. SPIVAK |
| FOURTH FLOOR |
| 1755 JEFFERSON DAVIS HIGHWAY |
| ARLINGTON, VA 22202 |
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