Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/19/1993
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Application #:
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07731478
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Filing Dt:
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07/17/1991
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Inventors:
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TOSHIHISA NOZAWA, JUNICHI ARAMI, ISAHIRO HASEGAWA, KATSUYA OKUMURA
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Title:
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ELECTROSTATIC CHUCK AND PLASMA APPARATUS EQUIPPED THEREWITH
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| 2-3-1, NISHI-SHINJUKU, SHINJUKU-KU |
| TOKYO, JAPAN |
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| 72 HORIKAWA-CHO, SAIWAI-KU |
| KAWASAKI-SHI, JAPAN |
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| OBLON, SPIVAK, MCCLELLAND, |
| MAIER & NEUSTADT, P.C. |
| ROBERT F. GNUSE |
| 1755 JEFFERSON DAVIS HWY., FOURTH FLOOR |
| ARLINGTON, VIRGINIA 22202 |
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