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Patent Assignment Abstract of Title
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Total Assignments: 3
Patent #:
Issue Dt:
10/26/1993
Application #:
07851017
Filing Dt:
03/13/1992
Inventor:
DAVID PALMER
Title:
PROCESS-CHAMBER FLOW CONTROL SYSTEM
Assignment: 1
Reel/Frame:
007365/0129Recorded: 02/28/1995Pages: 11
Conveyance:
SECURITY INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
02/01/1995
Assignee:
ATT - LOAN SERVICES
2202 NORTH FIRST STREET
SAN JOSE, CALIFORNIA 95131
Correspondent:
SILICON VALLEY BANK
FLORENCE G. KNISLEY
ATT - LOAN SERVICES
2202 NORTH FIRST STREET
SAN JOSE, CA 95131
Assignment: 2
Reel/Frame:
012852/0060Recorded: 07/03/2002Pages: 7
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
07/12/2001
Assignee:
200 AMES POND DRIVE
TEWKSBURY, MASSACHUSETTS 01876
Correspondent:
BROWN RUDNICK BERLACK ISRAELS
DAVID B. LOWRY, ESQ.
BOX IP, 18TH FLOOR
ONE FINANCIAL CENTER
BOSTON, M.A. 02111
Assignment: 3
Reel/Frame:
012958/0268Recorded: 08/07/2002Pages: 7
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
07/12/2001
Assignee:
15 ELIZABETH DRIVE
CHELMSFORD, MASSACHUSETTS 01824
Correspondent:
BROWN RUDNICK BERIACK ISRAELS
DAIVD D. LOWRY, ESQ.
ONE FINANCIAL CENTER
BOSTON, MA 02111

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