Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/28/1993
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Application #:
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07580986
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Filing Dt:
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09/12/1990
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Inventor:
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MEHRDAD M. MOSLEHI
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Title:
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METHOD AND APPARATUS FOR TIME-DIVISION PLASMA CHOPPING IN A MULTI-CHANNEL PLASMA PROCESSING EQUIPMENT
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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13500 NORTH CENTRAL EXPRESSWAY, A CORP. OF DE |
DALLAS, TEXAS 75265 |
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JAME T. COMFORT |
TEXAS INSTRUMENTS INCORPORATED |
P. O. BOX 655474, M/S 219 |
DALLAS, TX 75265 |
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