Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/11/1994
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Application #:
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08007163
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Filing Dt:
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01/21/1993
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Inventors:
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HIDEHIRO YANAGAWA, HIROYUKI NISHIUCHI, MASAKAZU SHIMADA, MITSUHIRO HIRANO et al
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Title:
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METHOD FOR SUPPLYING AND DISCHARGING GAS TO AND FROM SEMICONDUCTOR MANUFACTURING EQUIPMENT AND SYSTEM FOR EXECUTING THE SAME
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| 3-13, 2-CHOME, TORANOMON |
| MINATO-KU, TOKYO-TO, JAPAN |
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| DAVID L. FEHRMAN |
| GRAHAM & JAMES |
| 801 S. FIGUEROA STREET, 14TH FLOOR |
| L.A., CA. 90017-5554 |
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