Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/19/1994
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Application #:
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07999439
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Filing Dt:
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12/31/1992
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Inventors:
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DONALD J. SAMUELS, ROGER J. YERDON
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Title:
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METHOD OF OPTIMIZING EXPOSURE OF PHOTORESIST BY PATTERNING AS A FUNCTION OF THERMAL MODELING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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OLD ORCHARD ROAD |
ARMONK, NEW YORK 10504 |
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GRAHAM S. JONES, II |
IBM CORP., IP LAW DEPT. |
DEPT 18G/BLDG. 300-482 |
1580 ROUTE 52 |
HOPEWELL JUNCTION, NY 12533-6531 |
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