Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/10/1994
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Application #:
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07858575
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Filing Dt:
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03/27/1992
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Inventors:
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NORIO SAITOU, YOSHIHIKO OKAMOTO, TAKASHI YAMAZAKI, HIDEO TODOKORO
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Title:
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CHARGED PARTICLE BEAM LITHOGRAPHY SYSTEM AND METHOD THEREFOR
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| A CORP. OF JAPAN |
| 6, KANDA SURUGADAI 4-CHOME, CHIYODA-KU |
| TOKYO, JAPAN |
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| FAY, SHARPE, BEALLE, FAGAN, ET/AL |
| ATTN: THOMAS E. BEALL, JR. |
| 104 EAST HUME AVENUE |
| ALEXANDRIA, VIRGINIA 22301 |
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