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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
05/17/1994
Application #:
07923500
Filing Dt:
08/03/1992
Inventors:
NORIYUKI NOSE, KENJI SAITOH, HIROSHI OSAWA, MASANOBU HASEGAWA
Title:
METHOD AND APPARATUS FOR MEASURING DEVIATION BETWEEN PATTERNS ON A SEMICONDUCTOR WAFER
Assignment: 1
Reel/Frame:
006339/0735Recorded: 11/05/1992Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST.
Assignors:
Exec Dt:
10/22/1992
Exec Dt:
10/22/1992
Exec Dt:
10/22/1992
Exec Dt:
10/22/1992
Assignee:
30-2, 3-CHOME, SHIMOMARUKO, OHTA-KU
TOKYO, JAPAN
Correspondent:
GARY M. JACOBS
FITZPATRICK, CELLA, HARPER & SCINTO
277 PARK AVENUE
NEW YORK, NY 10172-0194

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