Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/31/1994
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Application #:
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08007888
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Filing Dt:
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01/22/1993
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Inventors:
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FUMIHIKO HASEGAWA, TATSUO OHTANI, HIROSHI KAWANO, MASAYUKI YAMADA
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Title:
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METHOD AND AN APPARATUS FOR POLISHING WAFER CHAMFERS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| 4-2 MARUNOUCHI 1-CHOME, CHIYODA-KU |
| TOKYO, JAPAN |
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| STEPHEN A. BECKER |
| LOWE, PRICE, LEBLANC & BECKER |
| 99 CANAL CENTER PLAZA, SUITE 300 |
| ALEXANDRIA, VA 22314 |
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