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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
06/21/1994
Application #:
07393950
Filing Dt:
08/15/1989
Inventors:
YASUTAKA KOHNO, MASAYUKI SAKAI
Title:
METHOD OF PRODUCING A SEMICONDUCTOR DEVICE USING ELECTRON CYCLOTRON RESONANCE PLASMA CVD AND SUBSTRATE BIASING
Assignment: 1
Reel/Frame:
005111/0627Recorded: 08/15/1989Pages: 1
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST.
Assignors:
Exec Dt:
07/06/1989
Exec Dt:
07/06/1989
Assignee:
2-3, MARUNOUCHI 2-CHOME, CHIYODA-KU
TOKYO, JAPAN
Correspondent:
LEYDIG, VOIT & MAYER
STE. 520
655 FIFTEENTH STREET, NW
WASHINGTON, DC 20005

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