Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/28/1994
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Application #:
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08070081
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Filing Dt:
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05/28/1993
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Inventors:
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TOSHIHIKO TANAKA, KOICHI OKADA
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Title:
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X-RAY MASK ALIGNMENT METHOD AND APPARATUS THEREFOR AS WELL AS X-RAY MASK TO BE USED TO SAID METHOD AND SAID APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 31-1, YUSHIMA, 3-CHOME, BUNKYO-KU |
| TOKYO, JAPAN |
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| NIELDS & LEMACK |
| HENRY C. NIELDS |
| 747 MAIN STREET, SUITE 200 |
| CONCORD, MASSACHUSETTS 01742 |
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