Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/12/1994
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Application #:
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07629566
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Filing Dt:
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12/18/1990
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Inventor:
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MAKOTO HIRAYAMA
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Title:
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METHOD FOR FORMING A THIN FILM ON A SEMICONDUCTOR DEVICE USING AN APPARATUS HAVING A LOAD LOCK
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-3 MARUNOUCHI 2-CHOME, CHIYODA-KU |
| TOKYO, JAPAN |
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| NIXON & VANDERHYE P.C. |
| BRYAN H. DAVIDSON |
| 1100 NORTH GLEBE ROAD, 8TH FLOOR |
| ARLINGTON, VIRGINIA 22201 |
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