Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/02/1994
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Application #:
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07972962
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Filing Dt:
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11/06/1992
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Inventors:
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TOSHINOBU SUGIYAMA, HIROSHI SAKURAI
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Title:
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METHOD OF DETERMINING CONDITIONS FOR PLASMA SILICON NITRIDE FILM GROWTH AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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7-35, KITASHINAGAWA 6-CHOME |
SHINAGAWA-KU, TOKYO 141, JAPAN |
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LEWIS T. STEADMAN |
HILL, STEADMAN & SIMPSON |
85TH FLOOR, SEARS TOWER |
CHICAGO, IL. 60606 |
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