Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/02/1994
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Application #:
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07907018
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Filing Dt:
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07/01/1992
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Inventors:
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MITSUHIRO NAKANO, JUNICHI KAI
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Title:
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CORRECTION OF CHARGED PARTICLE BEAM EXPOSURE DEFLECTION BY DETECTING STAGE POSITION AND A POSITION DETECTION MARK
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| 1015, KAMIKODANAKA, NAKAHARA-KU |
| KAWASAKI-SHI, KANAGAWA, 211, JAPAN |
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| 1844-2, KOZOJI-CHO 2-CHOME KASUGAI-SHI |
| AICHI, 487, JAPAN |
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| STAAS & HALSEY |
| H. J. STAAS |
| 1825 K ST. N.W. |
| WASHINGTON, D.C. 20006 |
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