Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/09/1994
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Application #:
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07966484
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Filing Dt:
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10/26/1992
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Inventors:
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AKIRA MATSUDA, SHIGEKI SHUDO, NOBORU SHIMAMOTO, KOHICHI TANAKA, HIROMASA HASHIMOTO et al
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Title:
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METHOD OF CHUCKING SEMICONDUCTOR WAFERS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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4-2, MARUNOUCHI 1-CHOME |
CHIYODA-KU, TOKYO, JAPAN |
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NIKAIDO, MARMELSTEIN, MURRAY & ORAM |
METROPOLITAN SQUARE, 655 15TH ST., N.W. |
G STREET LOBBY - SUITE 330 |
WASHINGTON, DC 20005 |
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