Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/27/1994
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Application #:
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07984797
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Filing Dt:
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12/02/1992
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Inventors:
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KENNETH S. COLLINS, JOHN R. TROW, JOSHUA CHIU-WING TSUI, CRAIG A. RODERICK et al
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Title:
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ELECTROSTATIC CHUCK FOR HIGH POWER PLASMA PROCESSING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVE. |
| SANTA CLARA, CALIFORNIA 95054 |
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| ROBERT J. STERN - MAIL STOP #0934 |
| PATENT COUNSEL |
| APPLIED MATERIALS, INC. |
| 3050 BOWERS AVE. |
| SANTA CLARA, CA 95054 |
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