Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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12/06/1994
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Application #:
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08000157
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Filing Dt:
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01/04/1993
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Inventors:
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G. MICHAEL MORRIS, YASUHIRO YOSHITAKE
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Title:
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REFRACTIVE/DIFFRACTIVE OPTICAL SYSTEM FOR BROAD-BAND THROUGH-THE-LENS IMAGING OF ALIGNMENT MARKS ON SUBSTRATES IN STEPPER MACHINES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| ROCHESTER, NEW YORK 14627 |
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| MARTIN LUKACHER |
| SUITE 900 |
| CLINTON SQUARE |
| ROCHESTER, NY 14604-1792 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| ROCHESTER, NEW YORK 14627 |
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| MARTIN LUKACHER |
| SUITE 900 |
| CLINTON SQUARE |
| ROCHESTER, NY 14604 |
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