Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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12/27/1994
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Application #:
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07818662
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Filing Dt:
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01/09/1992
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Inventors:
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SIAMAK SALIMIAN, MICHELANGELO DELFINO, BU-CHIN CHUNG
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Title:
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PLASMA ETCH PROCESS AND EQUIPMENT
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| SANDRA N. HIROSE |
| LEGAL DEPT. (E305) |
| VARIAN ASSOC., INC. |
| 3100 HANSEN WAY |
| PALO ALTO, CA 94304 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 35 DORY ROAD |
| GLOUCESTER, MASSACHUSETTS 01930 |
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| WOLF, GREENFIELD & SACKS, P.C. |
| WILLIAM R. MCCLELLAN |
| FEDERAL RESERVE PLAZA |
| 600 ATLANTIC AVENUE |
| BOSTON, MA 02210 |
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