Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/31/1995
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Application #:
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07501707
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Filing Dt:
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03/29/1990
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Inventors:
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STEPHEN D. RUSSELL, DOUGLAS A. SEXTON, RICHARD J. ORAZI
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Title:
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METHOD FOR LASER-ASSISTED SILICON ETCHING USING HALOCARBON AMBIENTS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| LEGAL COUNSEL FOR PATENTS |
| CODE 0012 |
| NAVAL OCEAN SYSTEMS CENTER |
| SAN DIEGO, CA 92152-5000 |
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