Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/07/1995
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Application #:
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08213737
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Filing Dt:
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03/16/1994
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Inventors:
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YASUNARI SOHDA, HIROYUKI ITOH, YASUHIRO SOMEDA, YOSHINORI NAKAYAMA, GENYA MATSUOKA et al
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Title:
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ELECTRON BEAM LITHOGRAPHY APPARATUS HAVING ELECTRON OPTICS CORRECTION SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| THOMAS E. BEALL, JR. |
| FAY, SHARPE, BEALL, FAGAN, MINNICH |
| & MCKEE |
| 104 EAST HUME AVENUE |
| ALEXANDRIA, VIRGINIA 22301 |
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