Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/14/1995
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Application #:
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08125805
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Filing Dt:
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09/24/1993
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Inventors:
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CHRISTOPH NOELSCHER, LEONHARD MADER
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Title:
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PHASE MASK FOR PROJECTION LITHOGRAPHY AND METHOD FOR THE MANUFACTURE THEREOF
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| AM CAMPEON 1-12 |
| NEUBIBERG, GERMANY 85579 |
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| IRIS DRUCKENBROD |
| AM CAMPEON 1-12 |
| PATENT DEPARTMENT MUC/11.2.348 |
| NEUBIBERG, 85579 FEDERAL REPUBLIC GERMANY |
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