Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/23/1995
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Application #:
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08248473
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Filing Dt:
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05/25/1994
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Inventors:
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ZHIZHANG CHEN, AJEET ROHATGI
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Title:
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METHOD FOR LOW TEMPERATURE PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION (PECVD) OF AN OXIDE AND NITRIDE ANTIREFLECTION COATING ON SILICON
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 400 TENTH STREET |
| CENTENNIAL RESEARCH BUILDING |
| ATLANTA, GEORGIA 30332-0415 |
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| SCOTT A. HORSTEMEYER |
| HOPKINS & THOMAS |
| 100 GALLERIA PARKWAY, N.W. |
| SUITE 1500 |
| ATLANTA, GA 30339 |
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