Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/13/1995
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Application #:
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08152896
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Filing Dt:
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11/17/1993
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Inventors:
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ATSUSHI KOMURA, YOSHIKAZU SAKANO, KENJI KONDO, KEIICHI KON, TETSUHIKO SANBEI, SHOJI MIURA
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Title:
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DRY ETCHING PROCESS FOR SEMICONDUCTOR
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-1 SHOWA-CHO |
| KARIYA CITY AICHI PREF., JAPAN 448 |
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| CUSHMAN, DARBY & CUSHMAN |
| G. LLOYD KNIGHT |
| 1100 NEW YORK AVENUE |
| NINTH FLOOR |
| WASHINGTON, DC 20005-3918 |
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