Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/27/1995
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Application #:
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08119769
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Filing Dt:
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09/09/1993
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Inventors:
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MARK A. MUELLER, XIN GUO, JOHN C. EGERMEIER
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Title:
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METHOD FOR IN-SITU CLEANING A TI TARGET IN A TI + TIN COATING PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVE. |
| SANTA CLARA, CALIFORNIA 95054 |
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| ROBERT J. STERN |
| PATENT COUNSEL-MAIL STOP #0934 |
| APPLIED MATERIALS, INC. |
| 3050 BOWERS AVE. |
| SANTA CLARA, CA 95054 |
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