Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/25/1995
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Application #:
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08047449
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Filing Dt:
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04/15/1993
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Inventors:
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MASAMI NISHIDA, MASAHIRO HIMOTO, TETSUYA HAMADA, NORIAKI YOKONO, TAKEO OKAMOTO
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Title:
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METHOD OF AND DEVICE FOR TRANSPORTING SEMICONDUCTOR SUBSTRATE IN SEMICONDUCTOR PROCESSING SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-1 TENJINKITAMACHI, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIKYO-KU |
| KYOTO, JAPAN |
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| LOWE, PRICE, LEBLANC & BECKER |
| MICHAEL S. GZYBOWSKI |
| 99 CANAL CENTER PLAZA, STE. 300 |
| ALEXANDRIA, VA 22314 |
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