Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/29/1995
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Application #:
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08269865
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Filing Dt:
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06/30/1994
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Inventors:
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STEVEN G. BARBEE, MADHAV DATTA, TONY F. HEINZ, LEPING LI, EUGENE H. RATZLAFF et al
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Title:
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METHOD AND APPARATUS FOR CONTACTLESS REAL-TIME IN-SITU MONITORING OF A CHEMICAL ETCHING PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| OLD ORCHARD ROAD |
| ARMONK,, NEW YORK 10504 |
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| IBM CORPORATION |
| MICHAEL J. BALCONI-LAMICA |
| INTELLECTUAL PROPERTY LAW DEPT. |
| DEPT. 34H/BLDG. 300-482, 1580 ROUTE 52 |
| HOPEWELL JUNCTION, NY 12533-6531 |
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