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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
10/03/1995
Application #:
08145991
Filing Dt:
10/29/1993
Inventors:
FRED C. REDEKER, CHARLES DORNFEST, JOHN YICK-CHUNG LEONG
Title:
PLASMA CLEANING OF A CVD OR ETCH REACTOR USING HELIUM FOR PLASMA STABILIZATION
Assignment: 1
Reel/Frame:
006906/0604Recorded: 12/27/1993Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
12/23/1993
Exec Dt:
12/07/1993
Exec Dt:
12/07/1993
Assignee:
3050 BOWERS AVE.
SANTA CLARA, CALIFORNIA 95054
Correspondent:
PETER J. SGARBOSSA
PATENT COUNSEL - MAIL STOP #0934
APPLIED MATERIALS, INC.
3050 BOWERS AVE.
SANTA CLARA, CA 95054

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