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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
5463459
Issue Dt:
10/31/1995
Application #:
08046720
Filing Dt:
04/16/1993
Inventors:
HIROSHI MORIOKA, MINORI NOGUCHI, YOSHIMASA OHSHIMA, YUKIO KEMBO, HIDETOSHI NISHIYAMA et al
Title:
METHOD AND APPARATUS FOR ANALYZING THE STATE OF GENERATION OF FOREIGN PARTICLES IN SEMICONDUCTOR FABRICATION PROCESS
Assignment: 1
Reel/Frame:
007653/0639Recorded: 09/28/1995Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
MORIOKA, HIROSHI
Exec Dt:
04/07/1993
NOGUCHI, MINORI
Exec Dt:
04/07/1993
OHSHIDA, YOSHIMASA
Exec Dt:
04/07/1993
KEMBO, YUKIO
Exec Dt:
04/07/1993
NISHIYAMA, HIDETOSHI
Exec Dt:
04/07/1993
MATSUOKA, KAZUHIKO
Exec Dt:
04/07/1993
SHIGYO, YOSHIHARU
Exec Dt:
04/07/1993
Assignee:
HITACHI, LTD.
CHIYODA-KU
6, KANDA SURUGADAI, 4-CHOME
TOKYO, JAPAN
Correspondent:
MELVIN KRAUS
ANTONELLI, TERRY, STOUT ET AL.
1300 N 17TH ST.
SUITE 1800
ARLINGTON, VA 22209
Assignment: 2
Reel/Frame:
026109/0528Recorded: 03/25/2011Pages: 16
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
HITACHI, LTD.
Exec Dt:
03/07/2011
Assignee:
RENESAS ELECTRONICS CORPORATION
1753 SHIMONUMABE, NAKAHARA-KU
KAWASAKI-SHI
KANAGAWA, JAPAN 211-8668
Correspondent:
ANTONELLI, TERRY, STOUT & KRAUS, LLP
1300 N. 17TH STREET, SUITE 1800
ARLINGTON, VIRGINIA 22209

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