Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/05/1995
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Application #:
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08153084
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Filing Dt:
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11/17/1993
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Inventors:
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RANDALL S. MUNDT, DAVID R. KERR, ERIC H. LENZ
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Title:
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TOPOLOGY INDUCED PLASMA ENHANCEMENT FOR ETCHED UNIFORMITY IMPROVEMENT
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538-6401 |
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| JAMES W. PETERSON |
| BURNS DOANE SWECKER & MATHIS |
| THE GEORGE MASON BUILDING |
| WASHINGTON & PRINCE STS., P.O. BOX 1404 |
| ALEXANDRIA, VA 22313-1404 |
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