Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/19/1995
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Application #:
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08241546
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Filing Dt:
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05/12/1994
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Inventor:
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CHI-MIN YUAN
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Title:
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PHOTOLITHOGRAPHIC DOSE DETERMINATION BY DIFFRACTION OF LATENT IMAGE GRATING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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OLD ORCHARD ROAD |
ARMONK, NEW YORK 10504 |
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IBM CORPORATION |
HAROLD HUBERFELD |
I. P. D., DEPT. 18G.BLDG. 300482 |
1580 ROUTE 52 |
HOPEWELL JUNCTION, NY 12533-6531 |
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