Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/23/1996
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Application #:
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08104318
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Filing Dt:
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08/09/1993
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Inventors:
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YAN YE, CHARLES S. RHOADES, GERALD Z. YIN
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Title:
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PLASMA DRY CLEANING OF SEMICONDUCTOR PROCESSING CHAMBERS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVE. |
| SANTA CLARA, CALIFORNIA 95054 |
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| PETER J. SGARBOSSA |
| PATENT COUNSEL - MAIL STOP #0934 |
| APPLIED MATERIALS, INC. |
| 3050 BOWERS AVE. |
| SANTA CLARA, CA 95054 |
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