Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/12/1996
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Application #:
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08350172
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Filing Dt:
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11/30/1994
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Inventor:
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HIROYUKI TANAKA
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Title:
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PHOTO-LITHOGRAPHY APPARATUS AND METHOD OF CORRECTING OFF-TELECENTRICITY OF THE APPARATUS CAUSED BY SHIFT OF EFFECTIVE ILLUMINATION SOURCE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1015, KAMIKODANAKA |
| NAKAHARA-KU, KAWASAKI-SHI |
| KANAGAWA 211, JAPAN |
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| CHARLES M. MARMELSTEIN |
| NIKAIDO, MARMELSTEIN, MURRAY ET AL |
| METROPOLITAN SQUARE, 655 15TH ST., N.W. |
| SUITE 330 - G STREET LOBBY |
| WASHINGTON, D.C. 20005-5701 |
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