Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/26/1996
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Application #:
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08302479
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Filing Dt:
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09/12/1994
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Inventors:
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OSAMU NAKAMURA, MASAMITSU YANAGIHARA, HIDEJI GOTO
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Title:
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EXPOSURE APPARATUS AND METHOD HAVING A MEASURING UNIT FOR MEASURING DISTANCES BETWEEN A MASK SURFACE AND A PROJECTION OPTICAL SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-3, MARUNOUCHI 3-CHOME |
| CHIYODA-KU, TOKYO 100, JAPAN |
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| SHAPIRO AND SHAPIRO |
| NELSON H. SHAPIRO |
| 1100 WILSON BLVD., STE. 1701 |
| ARLINGTON, VA 22209 |
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