Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/02/1996
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Application #:
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08308043
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Filing Dt:
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09/16/1994
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Inventors:
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ALLEN PAGE, OSCAR L. CATON
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Title:
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INSITU DETECTION OF TUBE SAGGING IN SEMICONDUCTOR DIFFUSION FURNACE USING A LASER BEAM THAT IS BLOCKED WHEN TUBE SAGS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1109 MCKAY DRIVE LEGAL DEPARTMENT, MS/45 |
| SAN JOSE, CALIFORNIA 95131 |
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| VLSI TECHNOLOGY, INC. |
| WILLIAM G. BECKER, ESQ. |
| 1109 MCKAY DRIVE |
| LEGAL DEPARTMENT, MS-45 |
| SAN JOSE, CALIFORNIA 95131 |
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