Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/16/1996
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Application #:
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08253458
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Filing Dt:
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06/03/1994
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Inventors:
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YUH-JIA SU, RICHARD MUH
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Title:
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METHOD OF CLEANING OF AN ELECTROSTATIC CHUCK IN PLASMA REACTORS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVE., SANTA CLARA, CA 95054 |
| CALIFORNIA |
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| PETER J. SGARBOSSA |
| APPLIED MATERIALS, INC. |
| PATENT COUNSEL - MAIL STOP #0934 |
| 3050 BOWERS AVENUE |
| SANTA CLARA, CA 95054 |
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