Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/16/1996
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Application #:
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08255523
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Filing Dt:
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06/08/1994
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Inventors:
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CHUNG CHAN, SHU QIN
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Title:
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PLASMA ION IMPLANTATION HYDROGENATION PROCESS UTILIZING VOLTAGE PUULSE APPLIED TO SUBSTRATE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 360 HUNTINGTON AVENUE |
| BOSTON, MASSACHUSETTS 02115 |
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| WEINGARTEN, SCHURGIN, GAGNEBIN & HAYES |
| THOMAS A. TURANO |
| TEN POST OFFICE SQUARE |
| BOSTON, MA 02109 |
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