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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
05/07/1996
Application #:
08272356
Filing Dt:
07/08/1994
Inventors:
HONGCHING SHAN, ROBERT WU
Title:
PROCESS FOR PLASMA ETCHING OF VIAS
Assignment: 1
Reel/Frame:
007224/0532Recorded: 09/19/1994Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
08/30/1994
Exec Dt:
09/14/1994
Assignee:
LEGAL AFFAIRS DEPARTMENT, 3050 BOWERS AVENUE
M/S #0934
SANTA CLARA, CALIFORNIA 95054
Correspondent:
PETER J. SGARBOSSA
APPLIED MATERIALS, INC.
LEGAL AFFAIRS DEPT.
3050 BOWERS AVE. M/S 0934
SANTA CLARA, CA 95054

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